Effect of oxygen concentration in the sputtering ambient on the microstructure, electrical and optical properties of radio-frequency magnetron-sputtered indium tin oxide films

Semiconductor Science and Technology

Volumn 11, Issue 2, 1996, Pages 196-202

  Wu, Wen Fa ^a   Chiou, Bi Shiou ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OXYGEN; SEMICONDUCTING INDIUM COMPOUNDS;

INDIUM TIN OXIDE FILMS; OPTICAL TRANSMITTANCE; OPTOELECTRICAL PROPERTIES; OXYGEN CONCENTRATION EFFECT; RADIO FREQUENCY MAGNETRON SPUTTERING; SPUTTERING AMBIENT;

SEMICONDUCTING FILMS;

EID: 0030084697     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/11/2/009     Document Type: Article

References (23)

1. Kobayashi H, Ishida T, Nakamura K, Nakato Y and Tsubomura H 1992 J. Appl. Phys. 72 5288
2. Wu W F and Chiou BS 1994 Thin Solid Films 247 201
3. Fan J C C and Goodenough J B 1977 J. Appl. Phys. 48 3524
4. Wu W F, Chiou B S and Hsieh S T 1994 Semicond. Sci. Technol. 9 1242
5. Matsuoka T, Kuwata J, Fujita Y and Abe A 1988 Japan. J. Appl. Phys. 27 L1199
6. Chubachi Y and Aoyama K 1991 Japan. J. Appl. Phys. 30 1442
7. Panicker M P R and Essinger WF 1981 J. Electrochem. Soc. 128 1943
8. Ichihara K and Okubo M 1994 Japan. J. Appl. Phys. 33 4478
9. Ichihara K, Inoue N, Okubo M and Yasuda N 1994 Thin Solid Films 245 152
10. Davis L 1993 Thin Solid Films 236 1
11. de Andrade A C and Moehlecke S 1994 Appl. Phys. A 58 503
12. Honda S, Tsujimoto A, Watamori M and Oura K 1994 Japan. J. Appl. Phys. 33 L1257
13. Honda S, Tsujimoto A, Watamori M and Oura K 1995 J. Vac. Sci. Technol. A 13 1100
14. Vasant Kumar C V R and Mansingh A 1989 J. Appl. Phys. 65 1270
15. Buchanan M, Webb J B and Williams D F 1980 Appl. Phys. Lett. 37 213
16. Higuchi M, Sawada M and Kuronuma Y 1993 J. Electrochem. Soc. 140 1773
17. Dutta J and Ray S 1988 Thin Solid Films 162 119
18. Ishida T, Kobayashi H and Nakato Y 1993 J. Appl. Phys. 73 4344
19. Nelson A J and Aharoni H 1987 J. Vac. Sci. Technol. A 5 231
20. Elfallal I, Pilkington R D and Hill A E 1993 Thin Solid Films 223 303
21. Martínez M A, Herrero J and Gutiérrez M T 1992 Solar Energy Mater. 26 309
22. Wu W F and Chiou BS 1993 Appl. Surf. Sci. 68 497
23. Burstein E 1954 Phys. Rev. 93 632