Reactive magnetron sputtering of indium tin oxide films on acrylics - electrical resistivity and optical properties

Journal of Materials Engineering and Performance

Volumn 9, Issue 4, 2000, Pages 424-427

  Huang, Jow Lay ^a   Jah, Yin Tsan ^a   Chen, Ching Yun ^a   Yau, Bao Shun ^a   Lin, Su Shia ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLICS; CHEMICAL BONDS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MORPHOLOGY; OPTICAL PROPERTIES; STOICHIOMETRY;

INDIUM TIN OXIDE;

INDIUM COMPOUNDS;

EID: 0034246117     PISSN: 10599495     EISSN: None     Source Type: Journal    
DOI: 10.1361/105994900770345827     Document Type: Article

References (17)

1. T. Furusaki, J. Takahashi, and K. Kodaira: J. Ceram. Soc. Jpn., 1994, vol. 102, pp. 202-07.
2. Douglas M. Mattox: Thin Solid Films, 1991, vol. 204, pp. 25-32.
3. J. Kane and H.P. Schweizer: Thin Solid Films, 1975, vol. 29, pp. 155-63.
4. J.A. Dobrowolski, F.C. Ho, D. Menagh, R. Simpon, and A. Waldorf: Appl. Opt., 1987, vol. 26 (24), pp. 5204-10.
5. J.C. Manifacier and J.P. Fillard: Thin Solid Films, 1981, vol. 77, pp. 67-80.
6. J. Machet, J. Guille, P. Saulnier, and S. Robert: Thin Solid Films, 1981, vol. 80, pp. 149-55.
7. J.L. Yao, S. Hao, and J.S. Wilkinson, Bab-Shun Yau, and Wen-Tse Lo: Thin Solid Films, 1990, vol. 189, pp. 227-33.
8. Jow-Lay Huang, Yin-Tsan Jah, Boo-Shun Yau, and Wen-Tse Lo: "Investigation of Reactive Magnetron Sputtering of Indium Tin Oxide Films on Acrylics", Journal of the Ceramic Society of Japan, Tokyo, Japan, 2000, 108[1], pp. 17-20.
9. Jow-Lay Huang, Yin-Tsan Jah, Bao-Shun Yau, and Wen-Tse Lo: "Reactive Magnetron Sputtering of Indium Tin Oxide on Acrylics Morphology and Bonding State," Thin Solid Films, Accepted, in press.
10. W.F. Wu and B.S. Chiou: Thin Solid Films, 1994, vol. 247, pp. 201-07.
11. K.F. Huang, T.M. Uen, Y.S. Gou, and C.R. Huang: Thin Solid Films, 1987, vol. 148, p. 7.
12. B.S. Chiou, S.T. Hsieh, and W.F. Wu: J. Am. Ceram. Soc., 1994, vol. 77 (7), pp. 1740-44.
13. C.V.R. Vasant Kumar and Abhai Mansingh: J. Appl. Phys., 1989, vol. 65 (3), pp. 1270-80.
14. Abhai Mansingh and C.V.R. Vasant Kumar: J. Phys. D: Appl. Phys., 1989, vol. 22, pp. 455-57.
15. M. Higuchi, M. Sawada, and Y. Kuronuma: J. Electrochem. Soc., 1993, vol. 140 (6), pp. 1773-75.
16. J. Dutta and S. Ray: Thin Sold Films, 1988, vol. 162, pp. 119-27.
17. G. Frank, E. Kauer, and H. Köstlin: Thin Solid Films, 1981, vol. 77, p. 107.