Properties of ITO films on glass fabricated by pulsed laser deposition

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 376-379

  Choi, Jin Baek ^a   Kim, Jong Hoon ^a   Jeon, Kyung Ah ^a   Lee, Sang Yeol ^a  

^a Yonsei University   (South Korea)

Author keywords

Indium tin oxide; Oxygen pressure; Resistivity; Substrate temperature; Transparent electrode

Indexed keywords

ATOMIC FORCE MICROSCOPY; GLASS; NEODYMIUM LASERS; PULSED LASER DEPOSITION; SEMICONDUCTING INDIUM COMPOUNDS; X RAY DIFFRACTION;

BOUNDARY SCATTERING;

SEMICONDUCTING FILMS;

EID: 0041510602     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00625-6     Document Type: Conference Paper

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