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Volumn 2, Issue , 2004, Pages 424-430

Ballistic phonon transport in strained Si/SiGe nanostructures with an application to strained-silicon transistors

Author keywords

Phonon Transport; Self heating; Strained Si; Thermal Conductivity

Indexed keywords

INTERFACE QUALITY; PHONON TRANSPORT; SELF HEATING; STRAINED SI;

EID: 4444276106     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (27)
  • 2
    • 0034794354 scopus 로고    scopus 로고
    • Strained Si NMOSFETs for high performance CMOS technology
    • June
    • K. Rim, et al., "Strained Si NMOSFETs for High Performance CMOS Technology," VLSI Technology Digest of Technical Papers Symposium, pp. 59-60, June 2001.
    • (2001) VLSI Technology Digest of Technical Papers Symposium , pp. 59-60
    • Rim, K.1
  • 4
    • 0003451265 scopus 로고
    • x substrates by Monte Carlo
    • x Substrates by Monte Carlo," Applied Physics Letters, vol. 62(21), pp. 2661-2663, 1993.
    • (1993) Applied Physics Letters , vol.62 , Issue.21 , pp. 2661-2663
    • Miyata, H.1
  • 5
    • 0036045608 scopus 로고    scopus 로고
    • Characteristics and device design of sub-100 nm strained Si N- and PMOSFETs
    • June
    • K. Rim, et al., "Characteristics and Device Design of Sub-100 nm Strained Si N- and PMOSFETs," VLSI Technology Digest of Technical Papers Symposium, pp. 98-99, June 2002.
    • (2002) VLSI Technology Digest of Technical Papers Symposium , pp. 98-99
    • Rim, K.1
  • 7
    • 0036712434 scopus 로고    scopus 로고
    • Electron and hole mobility enhancement in strained SOI by wafer bonding
    • Sept.
    • L. Haung, et al., "Electron and Hole Mobility Enhancement in Strained SOI by Wafer Bonding," IEEE Transaction on Electron Devices, vol. 49(9), pp. 1566-1571, Sept. 2002.
    • (2002) IEEE Transaction on Electron Devices , vol.49 , Issue.9 , pp. 1566-1571
    • Haung, L.1
  • 8
    • 0036045607 scopus 로고    scopus 로고
    • High-performance strained Si-on-insulator MOSFETs by novel fabrication processes utilizing Ge-condensation technique
    • June
    • T. Tezuka, "High-Performance Strained Si-on-Insulator MOSFETs by Novel Fabrication Processes Utilizing Ge-Condensation Technique," VLSI Technology Digest of Technical Papers Symposium, pp. 96-97, June 2002.
    • (2002) VLSI Technology Digest of Technical Papers Symposium , pp. 96-97
    • Tezuka, T.1
  • 9
    • 0036454668 scopus 로고    scopus 로고
    • Preparation of novel SiGe-free strained Si on insulator substrates
    • Oct.
    • T.A. Langdo, "Preparation of Novel SiGe-Free Strained Si on Insulator Substrates," IEEE International SOI Conference, pp. 221-222, Oct. 2002.
    • (2002) IEEE International SOI Conference , pp. 221-222
    • Langdo, T.A.1
  • 10
    • 0036610426 scopus 로고    scopus 로고
    • Measurement of the effect of self-heating in strained-silicon MOSFETs
    • June
    • K.A. Jenkins, and K. Rim, "Measurement of the Effect of Self-Heating in Strained-Silicon MOSFETs," IEEE Electron Device Letters, vol. 23(6), pp. 360-362, June 2002.
    • (2002) IEEE Electron Device Letters , vol.23 , Issue.6 , pp. 360-362
    • Jenkins, K.A.1    Rim, K.2
  • 11
    • 0002758190 scopus 로고
    • Thermal conductivity of Ge-Si alloys at high temperatures
    • Jan.
    • B. Abeles, et al., "Thermal Conductivity of Ge-Si Alloys at High Temperatures," Physical Review, vol. 125(1), pp. 44-26, Jan. 1962.
    • (1962) Physical Review , vol.125 , Issue.1 , pp. 44-126
    • Abeles, B.1
  • 12
    • 0000864408 scopus 로고    scopus 로고
    • Phonon-boundary scattering in thin silicon layers
    • M. Asheghi, et al., "Phonon-Boundary Scattering in Thin Silicon Layers," Applied Physics Letters, vol. 71, pp. 1798-1800, 1997.
    • (1997) Applied Physics Letters , vol.71 , pp. 1798-1800
    • Asheghi, M.1
  • 15
    • 4444302679 scopus 로고    scopus 로고
    • Thermal modeling of self-heating in strained-silicon MOSFETS
    • submitted to NV, June
    • W. Liu, M. Asheghi, "Thermal Modeling of Self-Heating in Strained-Silicon MOSFETS", submitted to ITherm Conference, NV, June 2004.
    • (2004) ITherm Conference
    • Liu, W.1    Asheghi, M.2
  • 17
    • 0026910294 scopus 로고
    • Heat transfer regimes in microstructure
    • M.I. Flik, et al., "Heat Transfer Regimes in Microstructure," ASME Journal of Heat Transfer, vol. 114, pp. 666-674, 1992.
    • (1992) ASME Journal of Heat Transfer , vol.114 , pp. 666-674
    • Flik, M.I.1
  • 18
    • 71749104133 scopus 로고
    • Microscale heat conduction in dielectric thin films
    • A. Majumdar, "Microscale Heat Conduction in Dielectric Thin Films," Journal of Heat Transfer, vol. 115, pp. 7-16, 1993.
    • (1993) Journal of Heat Transfer , vol.115 , pp. 7-16
    • Majumdar, A.1
  • 19
    • 1842780830 scopus 로고    scopus 로고
    • Modeling of localized heating effect in sub-micron silicon transistors
    • Paper No. HT2003-47272, July
    • K. Etessam-Yazdani, et al., "Modeling of Localized Heating Effect in Sub-Micron Silicon Transistors," Proc. ASME Summer Heat Transfer Conf., Paper No. HT2003-47272, July 2003.
    • (2003) Proc. ASME Summer Heat Transfer Conf.
    • Etessam-Yazdani, K.1
  • 21
    • 36149027857 scopus 로고
    • Analysis of lattice thermal conductivity
    • M. G. Holland, "Analysis of Lattice Thermal Conductivity," Physical Review, vol. 132 (6), pp. 2461-2471, 1963.
    • (1963) Physical Review , vol.132 , Issue.6 , pp. 2461-2471
    • Holland, M.G.1
  • 22
    • 36849136394 scopus 로고
    • Thermal and electrical properties of heavily doped Ge-Si alloys up to 1300 K
    • Oct.
    • J. P. Dismukes, "Thermal and Electrical Properties of Heavily Doped Ge-Si Alloys up to 1300 K," Journal of Applied Physics, vol. 35(10). pp. 2899-2907, Oct. 1964.
    • (1964) Journal of Applied Physics , vol.35 , Issue.10 , pp. 2899-2907
    • Dismukes, J.P.1
  • 23
    • 0039702996 scopus 로고    scopus 로고
    • Size and interface effects on thermal conductivity of superlattices and periodic thin-film structures
    • May
    • G. Chen, "Size and Interface Effects on Thermal Conductivity of Superlattices and Periodic Thin-Film Structures," Journal of Heat Transfer, vol. 119, pp. 220-229, May 1997.
    • (1997) Journal of Heat Transfer , vol.119 , pp. 220-229
    • Chen, G.1
  • 24
    • 51149220754 scopus 로고
    • Thermal boundary resistance
    • E.T. Swartz, and R.O. Pohl, "Thermal Boundary Resistance," Review of Modern Physics, vol. 61(3), pp. 605-668, 1989.
    • (1989) Review of Modern Physics , vol.61 , Issue.3 , pp. 605-668
    • Swartz, E.T.1    Pohl, R.O.2
  • 25
    • 0542378949 scopus 로고    scopus 로고
    • Thermal conductivity and ballistic-phonon transport in the cross-plane direction of superlattices
    • G. Chen, "Thermal Conductivity and Ballistic-Phonon Transport in the Cross-Plane Direction of Superlattices," Physical Review B, vol. 57(23), pp. 14958-14973, 1998.
    • (1998) Physical Review B , vol.57 , Issue.23 , pp. 14958-14973
    • Chen, G.1
  • 26
    • 0037091483 scopus 로고    scopus 로고
    • Thermal conduction in doped single-crystal silicon films
    • Apr.
    • M. Asheghi, et al., "Thermal Conduction in Doped Single-Crystal Silicon Films," Journal of Applied Physics, vol. 91(8), pp. 5079-88, Apr. 2002.
    • (2002) Journal of Applied Physics , vol.91 , Issue.8 , pp. 5079-5088
    • Asheghi, M.1
  • 27
    • 84862421753 scopus 로고    scopus 로고
    • http://www.cee.hw.ac.uk/~gmg/rough_surf/surfruf.htm


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.