Depth profiles of the Fermi level at an amorphous-carbon nitride/SiO2/n-type-Si heterojunction interface obtained by Kelvin probe force microscopy

Diamond and Related Materials

Volumn 15, Issue 9, 2006, Pages 1378-1382

  Ishizaki, Takahiro ^a   Saito, Nagahiro ^a   Ohta, Riichiro ^a   Takai, Osamu ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Amorphous carbon nitride; Kelvin probe force microscopy; Work function

Indexed keywords

AMORPHOUS MATERIALS; CARBON NITRIDE; HETEROJUNCTIONS; INTERFACES (MATERIALS);

AMORPHOUS-CARBON NITRIDE; DEPTH PROFILES; KELVIN PROBE FORCE MICROSCOPY; SURFACE TRAPPING; WORK FUNCTION;

FERMI LEVEL;

EID: 33746581938     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.10.001     Document Type: Article

References (20)

1. Wang E.G. Prog. Mater. Sci. 41 (1997) 241
2. Muhl S., and Mendez J.M. Diamond Relat. Mater. 8 (1999) 809
3. Chi E.J., Shim J.Y., Baik H.K., and Lee S.M. Appl. Phys. Lett. 71 (1997) 324
4. Modinos A., and Xanthakis J.P. Appl. Phys. Lett. 73 (1998) 1874
5. Chi E.J., Shim J.Y., Choi D.J., and Baik H.K. J. Vac. Sci. Technol., B 16 (1998) 1219
6. Reyes R., Legnani C., Pinto P.M.R., Cremona M., Araújo P.J.G., and Achete C.A. Appl Phys. Lett. 82 (2003) 4017
7. Aono M., Nitta S., Katsuno T., Itoh T., and Nomura S. Appl. Surf. Sci. 159-160 (2000) 341
8. Aono M., and Nitta S. Diamond Relat. Mater. 11 (2002) 1219
9. Breymesser A., Schlosser V., Peiro D., Voz C., Bertomeu J., Andreu J., and Summhammer J. Sol. Energy Mater. Sol. Cells 66 (2001) 171
10. Etrl G., and Küppers J. Low Energy Electrons and Surface Chemistry. Monographs in Modern Chemistry vol. 4 (1974), Verlag Chemie, Weinheim
11. Nonnenmacher M., O'Boyle M.P., and Wickramasinghe H.K. Appl. Phys. Lett. 58 (1991) 2921
12. Rezek B., Sauerer C., Nebel C.E., and Stutzman M. Appl. Phys. Lett. 82 (2003) 2266
13. Taki Y., Kitagawa T., and Takai O. Thin Solid Films 304 (1997) 183
14. Fujihira M. Annu. Rev. Mater. Sci. 29 (1999) 353
15. Sze S.M. Physics of Semiconductor Devices. 2nd ed. (1981), Wiley-Interscience, New York
16. Michaelson H.B. J. Appl. Phys. 48 (1977) 4729
17. Larciprete R., Goldoni A., Lizzit S., and Petaccia L. Appl. Surf. Sci. 248 (2005) 8
18. Orwa J.O., Shannon J.M., Gateru R.G., and Silva S.R.P. J. Appl. Phys. 97 (2005) 023519
19. Ludeke R., and Cartier E. Appl. Phys. Lett. 78 (2001) 3998
20. Schäfer J., Ristein J., Miyazaki S., and Ley L. J. Vac. Sci. Technol., A, Vac. Surf. Films 15 (1997) 408