Effects of heat treatment on the field emission property of amorphous carbon nitride

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1219-1221

  Chi, Eung Joon ^a   Shim, Jae Yeob ^a   Choi, Dong Jun ^a   Baik, Hong Koo ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001163262     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589987     Document Type: Article

References (11)

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