Infrared and optical properties of amorphous fluorinated hydrocarbon films deposited with the method of ECR plasma

Plasma Science and Technology

Volumn 6, Issue 3, 2004, Pages 2337-2341

  Xin, Yu ^a   Xu, Shenhua ^a   Ning, Zhaoyuan ^a   Chen, Jun ^a   Lu, Xinhua ^a   Xiang, Suliu ^a   Huang, Song ^a   Du, Wei ^a   Cheng, Shanhua ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

a C:F:H films; FTIR; Optical band gap; UV VIS

Indexed keywords

A-C:F:H FILMS; OPTICAL BAND GAP;

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROCARBONS; METHANE;

AMORPHOUS FILMS;

EID: 33746400148     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/6/3/014     Document Type: Article

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