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Journal of Micromechanics and Microengineering

Volumn 16, Issue 8, 2006, Pages 1602-1605

Focused-ion-beam-assisted fabrication of polymer rolled-up microtubes

(5) Luchnikov, V a Stamm, M a Akhmadaliev, Ch b Bischoff, L b Schmidt, B b

a LEIBNIZ INSTITUTE OF POLYMER RESEARCH DRESDEN (Germany)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMMINUTION; ION BEAMS; PHOTORESISTS; POLYSTYRENES; SPUTTERING; THIN FILMS;

FOCUSED ION BEAM (FIB); POLYMER FILMS; POLYMER ROLLED-UP MICROTUBES;

ORGANIC POLYMERS;

EID: 33746298611 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/16/8/022 Document Type: Article

Times cited : (16)

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