Formation of nanovoids in high-dose hydrogen implanted GaN

Applied Physics Letters

Volumn 89, Issue 3, 2006, Pages

  Radu, I ^a   Singh, R ^a   Scholz, R ^a   Gosele U ^a   Christiansen, S ^b   Bruderl G ^c   Eichler, C ^c   Harle V ^c  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^c OSRAM OPTO SEMICONDUCTORS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; HYDROGEN; ION IMPLANTATION; MICROCRACKS; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

CROSS SECTION TRANSMISSION ELECTRON MICROSCOPY; MICROCRACK FORMATION; NANOVOIDS; ROOM TEMPERATURE;

GALLIUM NITRIDE;

EID: 33746278367     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2221526     Document Type: Article

References (15)

1. S. Nakamura and G. Fasol, The Blue Laser Diode: GaN Based Light Emitters and Lasers (Springer, Berlin, 1997), p. 21.
2. C. R. Miskys, M. K. Kelly, O. Ambacher, and M. Stutzmann, Phys. Status Solidi C 0, 1627 (2003).
3. A. Tauzin, T. Akatsu, M. Rabarot, J. Dechamp, M. Zussy, H. Monceau, J. F. Michaud, A. M. Charvet, L. Di Cioccio, F. Fournel, J. Garrione, B. Faure, F. Letertre, and N. Kernevez, Electron. Lett. 41, 668 (2005).
4. M. Bruel, Nucl. Instrum. Methods Phys. Res. B 108, 313 (1996).
5. E. Jalaguier, B. Aspar, S. Pocas, J. F. Michaud, M. Zussy, A. M. Papon, and M. Bruel, Electron. Lett. 34, 408 (1998).
6. I. Radu, I. Szafraniak, R. Scholz, M. Alexe, and U. Gösele, J. Appl. Phys. 94, 7820 (2003).
7. Q.-Y. Tong, Y. L. Chao, L. J. Huang, and U. Gösele, Electron. Lett. 35, 341 (1999).
8. Q.-Y. Tong, K. Gutjahr, S. Hopfe, U. Gösele, and T. H. Lee, Appl. Phys. Lett. 70, 1390 (1997).
9. Q.-Y. Tong, L. J. Huang, and U. Gösele, J. Electron. Mater. 29, 928 (2000).
10. S. Kucheyev, J. Williams, C. Jagadish, J. Zou, and G. Li, J. Appl. Phys. 91, 3928 (2002).
11. S. Hayashi, B. Poust, B. Heying, and M. Goorsky, Proceedings of the IEEE International Symposium on Compound Semiconductors, San Diego, CA, 25-27 August 2003 (IEEE, Piscataway, NJ, 2003), pp. 106-107.
12. R. Singh, I. Radu, U. Gýsele, and S. H. Christiansen, Phys. Status Solidi C 3, 1754 (2006).
13. J. F. Ziegler, J. B. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
14. I. Szafraniak, I. Radu, R. Scholz, M. Alexe, and U. Gösele, Integr. Ferroelectr. 55, 983 (2003).
15. C. G. Ronning, E. P. Carlson, and R. F. Davis, Phys. Rep. 351, 349 (2001).