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Volumn 3, Issue , 2006, Pages 1754-1757

Investigation of hydrogen implantation induced blistering in GaN

Author keywords

[No Author keywords available]

Indexed keywords

BAND OF DEFECTS; BLISTERING; HYDROGEN IMPLANTATION; 61.72.VV; 61.81.JH; 68.37.LP; 68.55.LN; 81.05.EA;

ACTIVATION ENERGY; ANNEALING; HYDROGEN; ION IMPLANTATION; PROFILOMETRY; TRANSMISSION ELECTRON MICROSCOPY; DAMAGE DETECTION; SURFACE DEFECTS;

GALLIUM NITRIDE;

EID: 33746290896 PISSN: 18626351 EISSN: None Source Type: Journal
DOI: 10.1002/pssc.200565441 Document Type: Conference Paper

Times cited : (29)

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