Single-crystalline ferroelectric thin films by ion implantation and direct wafer bonding

Integrated Ferroelectrics

Volumn 55, Issue , 2003, Pages 983-990

  Szafraniak, I ^a   Radu, I ^a   Scholz, R ^a   Alexe, M ^a   Gosele U ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

Ferroelectric thin film; Ion implantation; Layer transfer

Indexed keywords

ANNEALING; FERROELECTRIC MATERIALS; ION IMPLANTATION; SINGLE CRYSTALS;

EXFOLIATION; FERROELECTRIC LAYERS; LAYER TRANSFER; WAFER BONDING;

FERROELECTRIC THIN FILMS;

EID: 33745560936     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390259452     Document Type: Article

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