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Volumn 2003-January, Issue , 2003, Pages 106-107

Exfoliation of GaN layers using hydrogen implantation

Author keywords

Annealing; Capacitive sensors; Crystallization; Gallium nitride; Hydrogen; Implants; Semiconductor materials; Space technology; Strain measurement; Substrates

Indexed keywords

ANNEALING; CAPACITIVE SENSORS; CRYSTALLIZATION; DENTAL PROSTHESES; GALLIUM ALLOYS; HYDROGEN; NEURAL PROSTHESES; SAPPHIRE; SEMICONDUCTOR MATERIALS; STRAIN MEASUREMENT; SUBSTRATES;

EID: 84943516475     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCS.2003.1239928     Document Type: Conference Paper
Times cited : (12)

References (2)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.