Prediction of radio frequency power effect on silicon nitride deposition using a genetic algorithm based neural network

Surface Engineering

Volumn 22, Issue 1, 2006, Pages 63-68

  Kim, B ^a   Bae, J ^a   Han, S S ^b  

^a Sejong University   (South Korea)

^b Myong Ji University   (South Korea)

Author keywords

Genetic algorithm; Model; Neural network; Plasma enhanced chemical vapour deposition

Indexed keywords

GENETIC ALGORITHMS; MATHEMATICAL MODELS; NEURAL NETWORKS; OPTIMIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX;

NITRIDE DEPOSITION; RADIO FREQUENCY POWER EFFECT; TRAINING FACTOR OPTIMISATION;

SILICON NITRIDE;

EID: 33746265809     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/174329406X84985     Document Type: Article

References (26)

1. H. Gleskova, S. Wagner, V. Gasparik and P. Kovac: Appl. Surf. Sci., 2001, 175, 12-16.
2. B. Kim, S. S. Han, T. S. Kim, B. S. Kim and I. J. Shim: IEEE Plasma Sci., 2003, 31, 317-323.
3. P. Temple-Boyer, L. Jalabert, L. Masarotto, J. L. Alay and J. R. Morante: J. Vac. Sci. Technol. A, 2000, A18, 2389-2393.
4. Y. B. Park and S. W. Rhee: J. Mater. Sci.-Mater. El., 2001, 12, 515-522.
5. S. E. Aleksandrov and A. Y. Kovalgin: J. Appl. Chem., 1996, 69, 1434-1440.
6. C. Doughty, D. C. Knick, J. B. Bailey and J. E. Spencer: J. Vac. Sci. Technol. A, 1999, A17, 2612-2618.
7. J. W. Lee, K. D. Mackenzie, D. Johnson, J. N. Sasserath, S. J. Pearton and F. Ren: J. Electrochem. Soc., 2000, 147, 1481-1486.
8. S. E. Aleksandrov, M. L. Khitchman, F. F. Grekov and V. Sh. Ivanov: J. Appl. Chem., 1996, 69, 1118-1125.
9. B. F. Hanyaloglu and E. S. Aydil: J. Vac. Sci. Technol. A, 1998, 16, 2794-2803.
10. T. M. Klein, T. M. Anderson, A. I. Chowdhury and G. N. Parsons: J. Vac. Sci. Technol. A, 1999, A17, 108-112.
11. S. S. Han, L. Cai, G. S. May and A. Rohatgi: IEEE T. Semiconduct. M., 1996, 9, 303-311.
12. B. Kim, K. Kwon, S. K. Kwon, J. M. Park, S. W. Yoo, K. S. Park, I. K. You and B.W. Kim: Thin Solid Films, 2003, 426, 8-15.
13. B. Kim, K. Kwon, S. K. Kwon, J. M. Park, S. W. Yoo, K. S. Park and B. W. Kim: J. Vac. Sci. Technol. B, 2002, B20, 2113-2119.
14. B. Kim and S. Park: IEEE Trans. Plasma Sci., 2002, 30, 698-705.
15. B. Kim and W. S. Hong: IEEE Trans. Plasma Sci., 2004, 32, 84-89.
16. D. E. Rummelhart and J. L. McClelland: 'Parallel distributed processing'; 1986, Cambridge, MIT Press.
17. D. F. Specht: IEEE Trans. Neural Network, 1991, 2, 568-576.
18. D. E. Goldberg: 'Genetic algorithms in search, optimisation and machine learning'; 1989, Reading, MA, Addison Wesley.
19. N. Chakraborti: Int. Mater. Rev., 2004, 49, 246-260.
20. B. Kim and S. Park: Chemom. Intell. Lab. Syst., 2001, 56, 39-50.
21. P. Frank, H. Jan and S. Henrik: Mat. Manufact. Proc., 2003, 18, 385-399.
22. Ö. Ralf: Fuzzy Set. Syst., 2000, 114, 311-324.
23. D. C. Montgomery: 'Design and analysis of experiments'; 1991, Singapore, John Wiley & Sons.
24. L. H. Tsoukalas and R. E. Uhrig: 'Fuzzy and neural approaches in engineering'; 1997, Canada, John Wiley&Sons.
25. B. Kim, D. W. Kim and S. S. Han: Vaccum, 2004, 72, 385-392.
26. K. Takechi, T. Takagi and S. Kaneko: Jpn. J. Appl. Phys., 1998, 37, 1996-2001.