Characterization of inductively coupled plasma using neural networks

IEEE Transactions on Plasma Science

Volumn 30, Issue 2 I, 2002, Pages 698-705

  Kim, Byungwhan ^a   Park, Sungjin ^b  

^a Sejong University   (South Korea)

^b Vacuum Science   (South Korea)

Author keywords

Electron density; Electron temperature; Factorial experiment; Inductively coupled plasma; Langmuir probe; Model; Neural networks; Plasma potential

Indexed keywords

CARRIER CONCENTRATION; CHLORINE; ERROR ANALYSIS; INDUCTIVELY COUPLED PLASMA; OPTIMIZATION; PLASMA ETCHING;

ELECTRON TEMPERATURES; PLASMA POTENTIALS;

NEURAL NETWORKS;

EID: 0036547609     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2002.1024272     Document Type: Article

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