Low temperature plasma deposition of silicon nitride from silane and nitrogen plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 5, 1998, Pages 2794-2803

  Hanyaloglu, Bengi F ^a   Aydil, Eray S ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032369236     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581424     Document Type: Article

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