About traceability, reproducibility and comparability of grid calibrations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3873, Issue pt 1, 1999, Pages 477-483

  Bosse, Harald ^a   Haessler Grohne, Wolfgang ^a   Brendel, Bernd ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; INTEGRATED CIRCUIT MANUFACTURE; MICROSTRUCTURE; PHOTOLITHOGRAPHY; POSITION MEASUREMENT; TWO DIMENSIONAL;

GRID CALIBRATION; GRID MATCHING; TRACEABILITY;

MASKS;

EID: 0033327378     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)