Status of the nanometer comparator at PTB

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4401, Issue , 2001, Pages 275-283

  Flügge, Jens ^a   Köning, Rainer ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COMPARATOR CIRCUITS; GLASS FIBERS; HETERODYNING; INTERFEROMETERS; NANOTECHNOLOGY; NEODYMIUM LASERS; PHOTOELECTRIC MICROSCOPES; PHOTOLITHOGRAPHY; SENSORS; SIGNAL DETECTION; VACUUM;

HETERODYNE INTERFEROMETRY; LASER INTERFEROMETERS; LENGTH COMPARATOR; MECHANICAL DISTORTIONS; NANOMETER COMPARATOR; PHOTOMASKS; THERMAL DISTORTIONS; TRACEABILITY; VACUUM INTERFEROMETRY;

COMPARATORS (OPTICAL);

EID: 0035761664     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445631     Document Type: Article

References (12)

1. H. Bosse, W. Haessler-Grohne, B. Brendel: "Traceability, reproducibility, and comparability of grid calibrations", Proc. SPIE Vol. 3873, p.477-483, 19th Annual Symposium on Photomask Technology, 1999.
2. H. Kunzmann, T. Pfeifer, J.Flügge: "Scales vs. Laserinterferometers. Performance and Comparison of two measurement systems", Annals of the CIRP Vol. 42/2/1993, p. 753-767.
3. J. Flügge, H. Kunzmann: Performance of laser interferometers and grating scales for high precision form manufacturing. UME 3, Aachen Mai 1994.
4. S.A. Lis, Air turbulence compensated interferometer for IC manufacturing.Proc. SPIE, 1995. 2440
5. J.B. Bryan. "Design and construction of an ultraprecision 84 inch diamond turning machine", Precision Engineering 1 1979, p. 13-17.
6. J. Flügge, H. Kunzmann: "An vacuum interferometer for the comparison of laser interferometers in air and interferometric grating scales", VDI Berichte 1118, March 1994
7. J. Flügge, H. Dangschat, A. Spies, J. Tschirnich, H. Pieles. "Concept of a interferometric length comparator with measurement uncertainties in the nanometer scale, Tagungsband 1. Euspen Conference, Bremen Mai 1999"
8. P. Cordiale, G. Galzerano, H. Schnatz: "International comparison of two iodine-stabilized frequency-doubled Nd:YAG lasers at lambda = 532 nm", Metrologia,2000,37,2,177-182
9. T.J. Quinn, Mise en Pratique of the Definition of the Metre (1992). Metrologia, 1993/94. 30, p.523-541.
10. R.C. Quenelle: "Nonlinearity in interferometer measurements". HP-Journal, 1983, p. 10.
11. C.M. Sutton, Nonlinearity in length measurement using heterodyn laser Michelson interferometry. J. Phys.E: Sci. Instrum., 1987. 20, p. 1290-1292.
12. M. Tanaka, T. Yamagami, K. Nahayama: "Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels". IEEE Trans on Instrum. and Measurement 38 (2) 1989.