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Volumn 40, Issue 1, 2006, Pages 56-63
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Effect of the initial thin Ti buffer layers on the quality of ZnO thin films grown on Si(111) substrates by MOCVD
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Author keywords
Metal organic chemical vapor deposition; Si substrate; Ti; ZnO
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Indexed keywords
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
PHOTOLUMINESCENCE;
SCANNING ELECTRON MICROSCOPY;
SILICON;
SUBSTRATES;
TITANIUM;
X RAY DIFFRACTION;
ZINC OXIDE;
EXCITONIC EMISSIONS;
INTERFERENCE MICROSCOPY;
MICROSCOPIC IMAGES;
SI SUBSTRATES;
THIN FILMS;
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EID: 33745749336
PISSN: 07496036
EISSN: 10963677
Source Type: Journal
DOI: 10.1016/j.spmi.2006.05.001 Document Type: Article |
Times cited : (20)
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References (23)
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