Formation of nanodots and nanostripes of carbon nitride on silicon by plasma and thermal treatments

Korean Journal of Chemical Engineering

Volumn 23, Issue 2, 2006, Pages 325-328

  Kim, Sang Hoon ^a   Hong, Ju Hyung ^b   Hahn, Yoon Bong ^a  

^a Chonbuk National University   (South Korea)

^b Korea Photonics Technology Institute (KOPTI)   (South Korea)

Author keywords

Amorphous Carbon Nitride; Nanostructures; PECVD; Thermal Annealing

Indexed keywords

EID: 33745640534     PISSN: 02561115     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02705736     Document Type: Article

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