Charge trapping in high-Κ gate dielectrics: A recent understanding

ECS Transactions

Volumn 2, Issue 1, 2006, Pages 311-328

  Misra, D ^a   Chowdhury, N A ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; DEPOSITION; ELECTRON TRAPS; MOS DEVICES; TRANSISTORS;

CHARGE TRAPPING; INJECTED ELECTRONS; SUBSTRATE INJECTION; THRESHOLD VOLTAGE SHIFT;

DIELECTRIC MATERIALS;

EID: 33745479385     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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