Fabrication of three-dimensional magnetic microdevices with embedded microcoils for magnetic potential concentration

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 624-638

  Ramadan, Qasem ^a   Samper, Victor D ^b   Puiu, Daniel Poenar ^c   Yu, Chen ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

CoNiP; Electroless plating; High aspect ratio; Magnetic field focusing; Microcoils CMP

Indexed keywords

ASPECT RATIO; ELECTRIC COILS; ELECTRIC CONDUCTORS; FABRICATION; FERROMAGNETIC MATERIALS; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES;

FERROMAGNETIC PILLARS; MAGNETIC FIELD GRADIENT; MAGNETIC MICRODEVICES; MAGNETIC POTENTIAL; MICROCOILS;

MAGNETIC DEVICES;

EID: 33745158640     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876788     Document Type: Article

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