Direct spectral phase function calculation for dispersive interferometric thickness profilometry

Optics Express

Volumn 12, Issue 21, 2004, Pages 5117-5124

  Kim, Daesuk ^a   Kim, Soohyun ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; FOURIER TRANSFORMS; FUNCTIONS; INTERFEROMETRY; NONDESTRUCTIVE EXAMINATION; PHASE SHIFT; SPECTROMETERS; THIN FILMS;

MICRO PROFILOMETRY; PHASE FUNCTIONS; PHASE MEASUREMENTS; SPECTROMETERS AND SPECTROSCOPIC INSTRUMENTATION;

PROFILOMETRY;

EID: 9144246362     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPEX.12.005117     Document Type: Article

References (14)

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