Optical profiler based on spectrally resolved white light interferometry

Optical Engineering

Volumn 44, Issue 1, 2005, Pages 1-5

  Debnath, S K ^a   Kothiyal, M P ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Phase shifting interferometry; Spectral interferogram analysis; Surface profile; White light interferometry

Indexed keywords

CHARGE COUPLED DEVICES; LIGHT SOURCES; MONOCHROMATORS; PHOTODETECTORS; PIEZOELECTRIC TRANSDUCERS; PROFILOMETRY; SPECTROGRAPHS;

OPTICAL PATH DIFFERENCE; PHASE SHIFTING INTERFEROMETRY; SPECTRAL INTERFEROGRAM ANALYSIS; SURFACE PROFILE; WHITE LIGHT INTERFEROMETRY;

INTERFEROMETRY;

EID: 14544290519     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1828468     Document Type: Article

References (19)

1. M. Davidson, K. Kaufman, I. Mazor, and F. Cohent, "An application of interference microscopy to integrated circuit inspection and metrology," in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, Ed., Proc. SPIE 775, 233-247 (1987).
2. B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope," Appl. Opt. 29, 3784-3788 (1990).
3. G. S. Kino and S. C. Chim, "Mirau correlation microscope," Appl. Opt. 29, 3775-3783 (1990).
4. T. Dresel, G. Häusler, and H. Venzke, "Three dimensional sensing of rough surfaces by coherence radar," Appl. Opt. 31, 919-925 (1992).
5. P. J. Caber, "Interferometric profiler for rough surfaces," Appl. Opt. 32, 3438-3441 (1993).
6. P. Sandoz and G. Tribillon, "Profilometry by zero order interference fringe identification," J. Mod. Opt. 40, 1691-1700 (1993).
7. P. de Groot and L. Deck, "Surface profiling by analysis of white light interferograms in the spatial frequency domain," J. Mod. Opt. 42, 389-401 (1995).
8. K. G. Larkin, "Efficient nonlinear algorithm for envelope detection in white light interferometry," J. Opt. Soc. Am. A 13, 832-843 (1996).
9. P. Sandoz, "An algorithm for profilometry by white light phase shifting interferometry," J. Mod. Opt. 43, 1545-1554 (1996).
10. P. Sandoz, R. Devillers, and A. Plata, "Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry," J. Mod. Opt. 44, 519-534 (1997).
11. A. Harasaki, J. Schmit, and C. Wyant, "Improved vertical-scanning interferometry," Appl. Opt. 39, 2107-2115 (2000).
12. P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, "Determination of fringe order in White-Light interference microscopy," Appl. Opt. 41, 4571-4578 (2002).
13. P. Sandoz, G. Tribillon, and H. Perrin, "High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms," J. Mod. Opt. 43, 701-708 (1996).
14. J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, "Spectrally-resolved white-light interferometry as a profilometry tool," Opt. Laser Technol. 28 (7), 485-489 (1996).
15. S. Suja Helen, M. P. Kothiyal, and R. S. Sirohi, "Analysis of spectrally resolved white light interferograms: use of a phase shifting technique," Opt. Eng. 40, 1329-1336 (2001).
16. S. Suja Helen, M. P. Kothiyal, and R. S. Sirohi, "Phase shifting by a rotating polarizer in white-light interferometry for surface profiling," .J. Mod. Opt. 46, 993-1001 (1999).
17. P. Hariharan and M. Roy, "White light phase stepping interferometry for surface profiling," J. Mod. Opt. 41, 2197-2201 (1994).
18. P. Hariharan, B. F. Oreb, and T. Eiju, "Digital phase-shifting interferometer: a simple error-compensating phase calculation algorithm," Appl. Opt. 26, 2504-2506 (1987).
19. A. Pfortner and J. Schwider, "Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures," Appl. Opt. 40, 6223-6228 (2001).