TEM studies of Ge nanocrystal formation in PECVD grown SiO 2:Ge/SiO2 multilayers

Journal of Physics Condensed Matter

Volumn 18, Issue 22, 2006, Pages 5037-5045

  Agan S ^a   Dana, A ^b   Aydinli, A ^b  

^a KIRIKKALE UNIVERSITY   (Turkey)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DIFFRACTION; ELECTRON ENERGY ANALYZERS; FILM GROWTH; GERMANIUM; MULTILAYERS; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

ELECTRON ENERGY-LOSS SPECTROSCOPY; GERMANOSILICATE-OXIDE; MICROGRAPHS; NANOCRYSTAL FORMATION;

NANOSTRUCTURED MATERIALS;

EID: 33744497814     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/22/004     Document Type: Article

References (24)

1. Wang K L, Liu J L and Jin G 2002 J. Cryst. Growth 237-239 1892
2. Wang Y Q, Kong G L, Chen W D, Diao H W, Chen C Y, Zhang S B and Liao X B 2002 Appl. Phys. Lett. 81 4174
3. Averin D V and Likharev K K 1986 J. Low-Temp. Phys. 77 2394
4. Meseguer F, Blanco A, Miguez H, Garcia-Santamaria F, Ibisate M and Lopez C 2002 Colloids Surf. 202 281
5. Shlimak I, Vagner I and Safarov V I 2000 Proc. 25th Int. Conf. on the Physics of Semiconductors (Osake: Springer)
6. Jie Y E, Xiong Y N, Wee A T S, Huan C H A and Ji W 2000 Appl. Phys. Lett. 77 3926
7. Nishii J, Kintaka K, Hosono H, Kawazoe H, Kato M and Muta K 1999 Phys. Rev. B 60 7166
8. Kim D W, Prins F E, Kim T, Hwang S, Lee C H, Kwong D L and Banerjee S K 2003 IEEE Trans. Electron Devices 50 510
9. Baron T, Pelissier B, Perniola L, Mazen F, Hartmann J M and Rolland G 2003 Appl. Phys. Lett. 83 1444
10. De Blauwe J 2002 IEEE Trans. Nanotechnol. 1 72
11. Niquet Y, Delerue C, Allan G and Lannoo M 2000 The Fall 2000 MRS Mtg (Boston, MA)
12. Ohba R, Sugiyama N and Uchida K 2002 IEEE Trans. Electron Devices 49 1392
13. Lee C, Gorur-Seetharam A and Kan E C 2003 IEDM Tech. Dig. 557
14. Maeda M, Yamamoto E, Ohfuji S and Itsumi M 1999 J. Vac. Sci. Technol. B 17 201
15. Serincan U, Kartopu G, Guenness A, Finstad T G, Turan R, Ekinci Y and Bayliss S C 2004 Semicond. Sci. Technol. 19 247
16. Kolobov A V, Wei S Q, Yan W S, Oyanagi H, Maeda Y and Tanaka K 2003 Phys. Rev. B 67 195314
17. Bonafos C, Garrido B, Lopes M, Perez-Rodriguez A, Morante J R, Kihn Y, Ben Assayag G and Claverie A 2000 Appl. Phys. Lett. 76 3962
18. Choi W K, Ho V, Ng V, Ho Y W, Ng S P and Chim W K 2005 Appl. Phys. Lett. 86 143114
19. Aǧan S, Çelik-Aktaş A, Zuo J M, Dana A and Aydinli A 2006 Appl. Phys. A 83 107
20. Modreanu M, Aperathitis E, Androulidaki M, Audier M and Chaix-Pluchery O 2005 Opt. Mater. 27 1020
21. Photopoulos P, Nassiopoulou A G, Kouvatsos D N and Travlos A 2000 Mater. Sci. Eng. B 69/70 345
22. Lockwood D J, Lu Z H and Baribeau J M 1996 Phys. Rev. Lett. 76 539
23. Nihonyanagi S, Nishimoto K and Kanemitsu Y 2002 J. Non-Cryst. Solids 299-302 1095
24. Maeda Y 1995 Phys. Rev. B 51 1658