Fabrication of piezoelectric Al0.3Ga0.7As microstructures

Sensors and Actuators, A: Physical

Volumn 115, Issue 1, 2004, Pages 96-103

  Kumar, Parshant ^a   Li, Lihua ^a   Calhoun, Lynn ^b   Boudreaux, Paul ^b   DeVoe, Don ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

AlGaAs; III V MEMS; Piezoelectric

Indexed keywords

MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MICROSTRUCTURE; PHOTODETECTORS; PIEZOELECTRICITY; SINGLE CRYSTALS;

ALGAAS; III-V MEMS; PHOTODETECTION; PIEZOELECTRIC TRANSDUCER;

ALUMINUM ALLOYS;

EID: 4243183575     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.04.002     Document Type: Article

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