Piezoelectric microbeam resonators based on epitaxial AlxGa 1-xAs films

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 307-310

  Li, Lihua ^a   Kumar, Parshant ^a   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

AlGaAs; Epitaxial; Piezoelectric; Resonator

Indexed keywords

ELECTROCHEMICAL ELECTRODES; EPITAXIAL GROWTH; LASER DOPPLER VELOCIMETERS; METALLIC FILMS; MICROPROCESSOR CHIPS; MOLECULAR BEAM EPITAXY; PIEZOELECTRIC MATERIALS; REACTIVE ION ETCHING; RESONATORS; SINGLE CRYSTALS;

ALGAAS; FOCUSED ION BEAMS (FIB);

ALUMINUM COMPOUNDS;

EID: 1942424114     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-41307     Document Type: Conference Paper

References (10)

1. W.-T. Hsu, C.T.-C Nguyen, 2002, "Stiffness-Compensated Temperature-Insensitive Micromechanical Resonators", Proc. MEMS 2002, pp. 731-734
2. K. Wang, A.-C. Wong, C.T.-C. Nguyen, 2000, "VHF Free-Free Beam High-Q Micromechanical Resonators", Journal of Microelectromechanical systems, Vol. 9, No. 3, pp. 347-360
3. W.-T. Hsu, J.R. Clark, C.T.-C. Nguyen, 2001, "Q-Optimized Lateral Free-Free Micromechanical Resonators", Proc. Transducers '01, pp. 1110-1113
4. W.-T. Hsu, H.R. Clark, C.T.-C. Nguyen, 2001, "A Sub-Micron Capacitive Gap Process for Multiple-metal-Electrode Lateral Micromechanical Resonators', Proc. IEEE 2001, pp. 349-352
5. J. Wang, J.E. Butler, D.S.Y. Hsu, C.T.-C. Nguyen, 2002, "CVD Polycrystalline Diamond High-Q Micromechanical Resonators", Proc. MEMS 2002, pp. 657-660
6. D.L. DeVoe, 2001, "Piezoelectric thin film micromechanical beam resonators", Sensors and Actuators, Vol. A88, pp. 263-272
7. R. Knobel, A. N. Cleland, 2002, "Piezoelectric Displacement Sensing with a Single Electron Transistor", Applied Physics Letters, Vol. 81, No. 12, pp. 2258-60
8. B. Piekarski, D.L. DeVoe, M. Dubey, R. Kaul, J. Conrad, 2001, "Surface micromachined piezoelectric resonant beam filters," Sensors and Actuators, Vol. A3013, pp. 1-8
9. 1-xAs: material parameters for use in research and device applications", J. Appl. Phys., Vol. 5893, pp. R1-R29 D.L. DeVoe, A.P. Pisano, 1997, "Modeling and optimal design of piezoelectric cantilever microactuators", J. MEMS, Vol. 9, No. 3, pp. 266-270
10. 1-xAs: material parameters for use in research and device applications", J. Appl. Phys., Vol. 5893, pp. R1-R29 D.L. DeVoe, A.P. Pisano, 1997, "Modeling and optimal design of piezoelectric cantilever microactuators", J. MEMS, Vol. 9, No. 3, pp. 266-270