Depth-dependent imaging of individual dopant atoms in silicon

Microscopy and Microanalysis

Volumn 10, Issue 2, 2004, Pages 291-300

  Voyles, P M ^a,c   Muller, D A ^a   Kirkland, E J ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b Cornell University   (United States)

^c University of Wisconsin Madison   (United States)

Author keywords

Electron channeling; Multislice simulation; Z contrast STEM

Indexed keywords

SILICON;

CHEMISTRY; COMPUTER SIMULATION; CONFERENCE PAPER; CRYSTALLIZATION; ELECTRON; SCANNING TRANSMISSION ELECTRON MICROSCOPY; THERMODYNAMICS;

COMPUTER SIMULATION; CRYSTALLIZATION; ELECTRONS; MICROSCOPY, ELECTRON, SCANNING TRANSMISSION; SILICON; THERMODYNAMICS;

EID: 2042515876     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604040012     Document Type: Conference Paper

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