Atomic scale defect analysis in the scanning transmission electron microscope

Microscopy Research and Technique

Volumn 69, Issue 5, 2006, Pages 330-342

  Arslan, Ilke ^a,d   Browning, Nigel D ^b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c University of California Davis   (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Dislocations; EELS; GaN; STEM; Z contrast

Indexed keywords

ATOMS; DEFECTS; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRONIC PROPERTIES; ENERGY DISSIPATION; GALLIUM NITRIDE; III-V SEMICONDUCTORS; TRANSMISSION ELECTRON MICROSCOPY;

ATOMIC SCALE; ATOMIC-SCALE DEFECTS; DEFECT ANALYSIS; DISLOCATION; ELECTRON ENERGY-LOSS SPECTROSCOPIES; PROPERTY; SCANNING TRANSMISSION ELECTRON MICROSCOPES; STEM; Z CONTRASTS; Z-CONTRAST IMAGING;

ELECTRON ENERGY LOSS SPECTROSCOPY;

GALLIUM; GALLIUM NITRIDE; NANOPARTICLE; OXYGEN; UNCLASSIFIED DRUG;

ARTICLE; ATOM; CHEMICAL STRUCTURE; ELECTRON; ELECTRON ENERGY LOSS SPECTROSCOPY; IMAGING; PRIORITY JOURNAL; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SEMICONDUCTOR; TRANSMISSION ELECTRON MICROSCOPY; Z CONTRAST IMAGING;

EID: 33646748340     PISSN: 1059910X     EISSN: 10970029     Source Type: Journal    
DOI: 10.1002/jemt.20289     Document Type: Article

References (44)

1. Allen LJ, Findlay SD, Lupini AR, Oxley MP, Pennycook SJ. 2003. Atomic-resolution electron energy loss spectroscopy imaging in aberration-corrected scanning transmission electron microscopy. Phys Rev Lett 91:105503.
2. Amali A, Rez P. 1997. Theory of lattice resolution in high-angle annular dark-field images. Microsc Microanal 3:28.
3. Arslan I, Browning ND. 2002. Intrinsic electronic structure of threading-dislocations in GaN. Phys Rev B 65:075310.
4. Arslan I, Browning ND. 2003. The role of oxygen in screw dislocations in GaN. Phys Rev Lett 91:165501.
5. Batson PE. 1993. Simultaneous STEM imaging and electron energy-loss spectroscopy with atomic-column sensitivity. Nature 366:727.
6. Batson PE, Dellby N, Krivanek OL. 2002. Sub-ångstrom resolution using aberration corrected electron optics. Nature 418:617.
7. Bethe H. 1930. Zur Theorie des Durchgangs Schneller Korpuskularstrahlen durch Materie. Ann Phys (Leipzig) 5:325.
8. Bianconi A. 1983. XANES Spectroscopy for local structures in complex systems. In: Bianconi A, Incoccia L, Stipcich S, editors. EXAFS and near edge structure. New York: Springer-Verlag, pp. 118-129.
9. Browning ND, Pennycook SJ. 1993. Atomic resolution spectroscopy for the microanalysis of materials. Microbeam Anal 2:81.
10. Browning ND, Yuan J, Brown LM. 1991. Real space determination of anisotropic electronic structure by electron energy loss spectroscopy. Ultramicroscopy 78:291.
11. Browning ND, Yuan J, Brown LM. 1993. Theoretical determination of angular integrated energy loss functions for anisotropic materials. Philos Mag A 67:261.
12. Browning ND, Moltaji HO, Buban JP. 1998. Determination of 3-D grain boundary structure in oxides through multiple scattering analysis of spatially resolved electron energy loss spectra. Phys Rev B 58:8289.
13. Cowley JM. 1986. Electron diffraction phenomena observed with a high resolution STEM instrument. J Electron Microsc Tech 3:25.
14. Dellby N, Krivanek OL, Nellist PD, Batson PE, Lupini AR. 2001. Progress in aberration-corrected scanning transmission electron microscopy. J Electron Microsc 50:177.
15. Durham PJ. 1983. Multiple scattering calculations of XANES. In: Bianconi A, Incoccia L, Stipcich S, editors. EXAFS and near edge structure. New York: Springer-Verlag. pp.37-42.
16. Duscher G, Browning ND, Pennycook SJ. 1998. Atomic column resolved EELS. Physica Status Solidi 166:327.
17. Egerton RF. 1996. Electron energy loss spectroscopy in the electron microscope. New York: Plenum.
18. Fertig J, Rose H. 1981. Resolution and contrast of crystalline objects in high-resolution scanning transmission electron microscopy. Optik 59:407.
19. Haider M, Uhlemann S, Schwan E, Rose H, Kabius B, Urban K. 1998. Electron microscopy image enhanced. Nature 392:768.
20. Hillyard S, Loane RF, Silcox J. 1993. Annular dark-field imaging-resolution and thickness effects. Ultramicroscopy 49:14.
21. James EM, Browning ND. 1999. Practical aspects of atomic resolution imaging and spectroscopy in STEM. Ultramicroscopy 78:125.
22. James EM, Browning ND, Nicholls AW, Kawasaki M, Xin Y, Stemmer S. 1998. Demonstration of atomic resolution Z-contrast imaging in a 200kv field emission TEM/STEM. J Electron Microsc 47:561.
23. Jesson DE, Pennycook SJ. 1993. Incoherent imaging of thin specimens using coherently scattered electrons. Proc R Soc Lond A 441:261.
24. Jesson DE, Pennycook SJ. 1995. Incoherent imaging of crystals using thermally scattered electrons. Proc R Soc Lond A 449:273.
25. Klie RF. 2002. Nanoscale characterization of oxide materials by atomic resolution Z-contrast imaging and EELS. PhD Thesis, University of Illinois at Chicago.
26. Krivanek OL, Dellby N, Lupini AR. 1999. Towards sub-Å electron beams. Ultramicroscopy 78:1.
27. Lindner Th, Sauer H, Engel W, Kambe K. 1986. Near-edge structure in electron energy loss spectra of MgO. Phys Rev B 33:22.
28. Manson ST. 1978. The calculation of photoionization cross-sections: an atomic view. In: Topics in applied physics, vol. 26. New York: Springer-Verlag, pp. 135-163.
29. Maslen VW, Rossouw CJ. 1983. The inelastic scattering matrix element and its application to electron energy loss spectroscopy. Philos Mag A 47:119.
30. Muller DA, Silcox J. 1995. Delocalization in inelastic scattering. Ultramicroscopy 59:195.
31. 3 states of carbon at sub-nanometer spatial resolution. Nature 366:725.
32. Nellist PD, Pennycook SJ. 1999. Incoherent imaging using dynamically scattered coherent electrons. Ultramicroscopy 78:111.
33. Pennycook SJ, Boatner LA. 1988. Chemically sensitive structure imaging with a scanning transmission electron microscope. Nature 336:565.
34. Pennycook SJ, Jesson DE. 1990. High resolution incoherent imaging of crystals. Phys Rev Lett 64:938.
35. Pennycook SJ, Jesson DE, Browning ND. 1995. Atomic-resolution electron energy loss spectroscopy in crystalline solids. Nucl Instrum Methods B 96:575.
36. Rafferty B, Pennycook SJ. 1999. Towards atomic column-by-column spectroscopy. Ultramicroscopy 78:141.
37. Reimer L. 1993. Transmission electron microscopy: physics of image formation and microanalysis, 3rd edition. New York: Springer-Verlag.
38. Rez P, Bruley J, Brohan P, Payne M, Garvie LAJ. 1995. Review of the methods for calculating near-edge structures. Ultramicroscopy 59:159.
39. Ritchie RH, Howie A. 1988. Inelastic-scattering probabilities in scanning-transmission electron-microscopy. Philos Mag A 58:753.
40. Rossouw CJ, Maslen VW. 1984. Implications of (e,2e) scattering for inelastic electron diffraction in crystals. Philos Mag A 49:743.
41. Rossouw CJ, Allen LJ, Findlay SD, Oxley MP. 2003. Channelling effects in atomic resolution STEM. Ultramicroscopy 96:299.
42. Tafto J. 1984. Absorption edge fine-structure study with sub-unit-cell spatial resolution. Nucl Instrum Methods B 2:733.
43. Williams DB, Carter CB. 1996. Transmission electron microscopy. New York: Plenum.
44. Xin Y, James EM, Arslan I, Browning ND, Pennycook SJ, Omnès F, Beaumont B, Faurie JP, Gibart P. 2000. Direct experimental observation of the local electronic structure at threading dislocations in metalorganic vaper phase epitaxy grown wurtzite GaN thin films. Appl Phys Lett 76:466.