Multilayered metal oxide thin film gas sensors obtained by conventional and RF plasma-assisted laser ablation

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4637-4641

  Mitu, B ^b   Marotta, V ^a   Orlando, S ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

^b NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Laser deposition; Semiconducting oxides; Thin film; Toxic gas sensors

Indexed keywords

DEPOSITION; ELECTRIC RESISTANCE; ELECTRICAL ENGINEERING; INDIUM COMPOUNDS; LASER ABLATION; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TIN COMPOUNDS; X RAY DIFFRACTION;

LASER DEPOSITION; MULTILAYERED METAL OXIDE; SEMICONDUCTING OXIDES; TOXIC GAS SENSORS;

CHEMICAL SENSORS;

EID: 33646589660     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.102     Document Type: Article

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