Reactive pulsed laser ablation and deposition of thin indium tin oxide films for solid state compact sensors

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 522-526

  Teghil, R ^a   Marotta, V ^b   Giardini Guidoni, A ^c   Di Palma, T M ^c   Flamini, C ^c  

^a UNIVERSITY OF BASILICATA   (Italy)

^b CNR   (Italy)

^c SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

Film deposition; Indium tin oxide; Laser ablation; Sensors

Indexed keywords

EID: 0001559611     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00448-6     Document Type: Article

References (7)

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