A study of angular dependence in the ablation rate of polymers by nanosecond pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6106, Issue , 2006, Pages

  Pedder, James E A ^a   Holmes, Andrew S ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Excimer laser; Laser ablation; MEMS; Microstructures; Modelling; Simulation; Solid state laser

Indexed keywords

COMPUTER SIMULATION; EXCIMER LASERS; LASER ABLATION; LASER PULSES; MATHEMATICAL MODELS; SOLID STATE LASERS;

ABLATION MECHANISM; ANGULAR DEPENDENCE; MICROFABRICATION; NANOSECOND PULSES;

POLYMERS;

EID: 33646540153     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.659793     Document Type: Conference Paper

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