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Volumn 1, Issue , 2003, Pages 702-705

Design, fabrication and characterization of an axial-flow turbine for flow sensing

Author keywords

Electromagnetic devices; Fabrication; Fluid flow; Polymers; Rotors; Sandwich structures; Silicon; Stators; Turbines; Voltage

Indexed keywords

ACTUATORS; AXIAL FLOW; AXIAL FLOW TURBOMACHINERY; ELECTRIC POTENTIAL; ELECTROMAGNETS; FABRICATION; FLOW OF GASES; MICROSYSTEMS; NITROGEN; POLYMERS; RADIAL FLOW; ROTORS; ROTORS (WINDINGS); SANDWICH STRUCTURES; SILICON; SOLID-STATE SENSORS; STATORS; TRANSDUCERS; TURBINES;

EID: 84944750354     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215570     Document Type: Conference Paper
Times cited : (13)

References (7)
  • 2
    • 0030400026 scopus 로고    scopus 로고
    • Micro-turbo-generator design and fabrication: A preliminary study
    • T. G. Wiegele, "Micro-turbo-generator design and fabrication: a preliminary study", Proc. IECEC '96, vol. 4, pp. 2308-2313.
    • Proc. IECEC '96 , vol.4 , pp. 2308-2313
    • Wiegele, T.G.1
  • 3
    • 0345325567 scopus 로고    scopus 로고
    • Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching
    • A. Mehra, A. A. Ayon, I. A. Waitz, M. A. Schmidt, "Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching", IEEE Journal of MicroElectroMechanical Systems, 8(2), pp. 152-160 (1999).
    • (1999) IEEE Journal of MicroElectroMechanical Systems , vol.8 , Issue.2 , pp. 152-160
    • Mehra, A.1    Ayon, A.A.2    Waitz, I.A.3    Schmidt, M.A.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.