Advanced laser micro-structuring of super large area optical films

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5720, Issue , 2005, Pages 204-211

  Boehlen, Karl L ^a   Stassen Boehlen, Ines B ^a   Allott, Ric ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

High precision processing; Laser micro machining; Micro lens arrays; Super large area processing

Indexed keywords

ETCHING; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; MICROMACHINING; MICROSTRUCTURE; OPTICAL FILMS; RAPID PROTOTYPING; SYNCHRONIZATION;

HIGH PRECISION PROCESSING; LASER MICRO MACHINING; MICRO-LENS ARRAYS; SUPER LARGE AREA PROCESSING;

LASER OPTICS;

EID: 21844449680     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599396     Document Type: Conference Paper

References (5)

1. P.T. Rumsby "Advanced laser tools for display device production on super large substrates", IMID 2002, Digest
2. H.J. Booth "Recent Applications of pulsed lasers in advanced materials processing", Thin Solid Films 2004, to be published
3. C. Abbott et al. "New techniques for laser micromachining MEMS devices", Proc. of SPIE 2002, Vol. 4760, p.281, 2002
4. K.L. Boehlen, I.B. Stassen Boehlen "Laser micro-machining of high density optical structures on large substrates", Proc. of SPIE 2004, Vol
5. K.L. Boehlen, "R & D report about SIS machining of Polycarbonate", Exitech internal report, 2004