Excimer laser micromachining with half-tone masks for the fabrication of 3-D microstructures

IEE Proceedings: Science, Measurement and Technology

Volumn 151, Issue 2, 2004, Pages 85-92

  Holmes, A S ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ETCHING; EXCIMER LASERS; MASKS; MICROMACHINING; PHOTORESISTS;

HALF-TONE MASKS; LASER MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 16544374083     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20040374     Document Type: Article

References (15)

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