Modelling of solid-state and excimer laser processes for 3D micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5713, Issue , 2005, Pages 180-189

  Holmes, Andrew S ^a   Onischenko, Alexander I ^a   George, David S ^a   Pedder, James E ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Excimer laser; Laser ablation; MEMS; Microstructures; Modelling; Simulation; Solid state laser

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; LASER ABLATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; PHOTORESISTS; SOLID STATE LASERS; SURFACE ROUGHNESS;

DIRECT-WRITE MACHINING; MEMS; PULSE REPITITON RATE (PRR); SOLID-STATE LASERS;

EXCIMER LASERS;

EID: 23644454632     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600632     Document Type: Conference Paper

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