Excimer laser ablation for micro-machining: Geometric effects

Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 415-419

  Dyer, P E ^a   Karnakis, D M ^a   Key, P H ^a   Monk, P ^a  

^a UNIVERSITY OF HULL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EPOXY RESINS; GAS LASERS; LASER PULSES; MICROMACHINING; MORPHOLOGY; SURFACE STRUCTURE; SURFACES;

CONCAVE SURFACES; CONVEX SURFACES; EXCIMER LASER ABLATION; GEOMETRIC EFFECTS; SURFACE GEOMETRY; SURFACE PROFILES;

LASER ABLATION;

EID: 0030563098     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00496-3     Document Type: Article

References (3)

1. R. Kelly and J.E. Rothenberg, Nucl. Instr. Meth. B 7/8 (1985) 755.
2. P.E. Dyer, S.D. Jenkins and J. Sidhu, Appl. Phys. Lett. 49 (1986) 453.
3. P.E. Dyer, P.H. Key, D. Sands, H.V. Snelling and F.X. Wagner, Appl. Surf. Sci. 86 (1995) 18.