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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1399-1403

Properties of co-deposited indium tin oxide and zinc oxide films using a bipolar pulse power supply and a dual magnetron sputter source

(4) Hwang, Man Soo a Jeong, Heui Seob a Kim, Won Mok a,b Seo, Yong Woon a

a ITM Inc (South Korea)

b Korea Institute of Science and Technology (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OXIDES; PROBES; SPUTTER DEPOSITION; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

BIPOLAR PULSE POWER SUPPLY; FOUR POINT PROBE; LIGHT TRANSMITTANCE; TIN OXIDE;

MULTILAYERS;

EID: 0042029688 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1575225 Document Type: Article

Times cited : (10)

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