Electron kinetics in cylindrical discharges of magnetron configurations

Plasma Sources Science and Technology

Volumn 15, Issue 2, 2006, Pages 228-236

  Golubovskii, Yu B ^a   Porokhova, I A ^a   Sushkov, V P ^a   Holik M ^b   Kudrna, P ^b   Tichy M ^b  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^b CHARLES UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; CATHODES; DC MACHINERY; ELECTRIC DISCHARGES; IONIZATION; KINETIC ENERGY; MAGNETRONS;

BOLTZMANN KINETIC EQUATION; HOLLOW-CATHODES; MAGNETRON CONFIGURATIONS; POST-CATHODES;

ELECTRON EMISSION;

EID: 33646352205     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/2/007     Document Type: Conference Paper

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