Anisotropy of the electron component in a cylindrical magnetron discharge. II. Application to real magnetron discharge

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 71, Issue 6, 2005, Pages

  Porokhova, I A ^a,b   Golubovskii, Yu B ^a   Behnke, J F ^b  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^b UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN KINETIC EQUATION; CYLINDRICAL MAGNETRON DISCHARGE; ELECTRON PHASE SPACE DISTRIBUTION FUNCTION;

ANISOTROPY; CARRIER CONCENTRATION; ELECTRIC FIELDS; KINETIC ENERGY; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING;

ELECTRONS;

EID: 27944459350     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.71.066407     Document Type: Article

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