Recent developments in inverted cylindrical magnetron sputtering

Surface and Coatings Technology

Volumn 146-147, Issue , 2001, Pages 457-462

  Glocker, David A ^a   Romach, Mark M ^a   Lindberg, Vern W ^b  

^a Isoflux Incorporated   (United States)

^b ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cylindrical magnetron; Dielectric material; Sputtering

Indexed keywords

COATINGS; FIBERS; IONIZATION; MAGNETRONS; SUBSTRATES;

BIOMEDICAL IMPLANTS;

MAGNETRON SPUTTERING;

COATING; DIELECTRIC PROPERTY; SPUTTERING; WIRE;

EID: 0035465606     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01487-6     Document Type: Article

References (8)