2-D experimental study of the plasma parameter variations of the magnetically sustained DC discharge in cylindrical symmetry in argon

Contributions to Plasma Physics

Volumn 44, Issue 7-8, 2004, Pages 613-618

  Holik M ^a,b   Bilyk, O ^a   Marek, A ^a   Kudrna, P ^a,b   Behnke, J F ^b   Tichy M ^a,b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

Axial dependence; Cylindrical magnetron; Electron density; Langmuir probe; Mean energy; Radial dependence

Indexed keywords

ELECTRIC DISCHARGES; ELECTRODES; ELECTRON DENSITY MEASUREMENT; ELECTRONS; LANGMUIR PROBES; MAGNETRONS; PLASMA DEVICES;

AXIAL DEPENDENCE; AXIAL DISTRIBUTION; CYLINDRICAL MAGNETRA; CYLINDRICAL SYMMETRY; MEAN ENERGY; PARAMETERS VARIATIONS; PLASMA PARAMETER; RADIAL DEPENDENCE; RADIAL DISTRIBUTIONS; SET-UPS;

CARRIER CONCENTRATION;

EID: 10844272394     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.200410090     Document Type: Article

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