Properties of Al-doped ZnO thin film sputtered from powder compacted target

Materials Letters

Volumn 60, Issue 15, 2006, Pages 1931-1935

  Kim, Kyoo Ho ^a   Wibowo, Rachmat Adhi ^a   Munir, Badrul ^a  

^a Yeungnam University   (South Korea)

Author keywords

Al doped ZnO; Powder compacted target; Sputtering; Transparent conducting

Indexed keywords

ALUMINUM; CRYSTALLINE MATERIALS; DOPING (ADDITIVES); MAGNETRON SPUTTERING; POWDERS; SUBSTRATES;

AL-DOPED ZNO; BAND GAP; POWDER COMPACTED TARGET; TRANSPARENT CONDUCTING;

THIN FILMS;

EID: 33646065675     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2005.12.055     Document Type: Article

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