Dry release of polymer structures with anti-sticking layer

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 837-841

  Cheng, M C ^a   Gadre, A P ^b   Garra, J A ^b   Nijdam, A J ^a   Luo, C ^b   Schneider, T W ^c   White, R C ^c   Currie, J F ^b   Paranjape, M ^b  

^a OHIO STATE UNIVERSITY   (United States)

^b GEORGETOWN UNIVERSITY   (United States)

^c SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL APPLICATIONS; MICROFLUIDIC SYSTEMS; UV PHOTORESIST; WET ETCHING;

ADHESION; CONTAMINATION; DEFORMATION; ENCAPSULATION; ETCHING; GLASS TRANSITION; INTERFACIAL ENERGY; MEDICAL APPLICATIONS; MICROSTRUCTURE; MONOLAYERS; PHOTORESISTS; POLYSTYRENES; PROBLEM SOLVING; SUBSTRATES; SURFACE ROUGHNESS; WETTING;

POLYTETRAFLUOROETHYLENES;

EID: 3142529282     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1724836     Document Type: Conference Paper

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