Advances in nanolithography using molecular rulers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 3116-3119

  Anderson, M E ^a   Tan, L P ^a   Tanaka, H ^a   Mihok, M ^a   Lee, H ^a,c   Horn, M W ^b   Weiss, P S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b The Center for Nanotechnology Education and Utilization   (United States)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ETHANOL; ITERATIVE METHODS; MULTILAYERS; PHOTOLITHOGRAPHY; SCANNING; SELF ASSEMBLY; SILICON WAFERS;

MOLECULAR RULER PROCESS; SCANNING PROBE NANOLITHOGRAPHY;

NANOTECHNOLOGY;

EID: 0942289201     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1621662     Document Type: Conference Paper

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