Resist materials for proton micromachining

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 158, Issue 1, 1999, Pages 179-184

  Van Kan, J A ^a   Sanchez, J L ^a   Xu, B ^b   Osipowicz, T ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROMACHINING; MICROSTRUCTURE; MOLECULAR WEIGHT; PHOTORESISTS; POLYMETHYL METHACRYLATES; PROTONS; X RAY LITHOGRAPHY;

NUCLEAR MICROSCOPES; PROTON BEAM MICROMACHINING;

ION BEAM LITHOGRAPHY;

EID: 0033313539     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00392-4     Document Type: Article

References (15)

1. E.W. Becker et al., Microelectron. Eng. 4 (1986) 35.
2. W. Ehrfeld, H. Lehr, Rad. Phys. Chem. 45 (1995) 349.
3. K. Ikuta, K. Hirowatari, Proceedings of IEEE International Workshop on Micro Electro Mechanical Systems, vol. 47, 1993, p. 42.
4. A. Bertsch, H. Lorenz, P. Renaud, Proceedings of MEMS IEEE, Heidelberg, Germany 1998, p. 18.
5. A. Bertsch, S. Zissi, J.Y. Jezequel, S. Corbel, J.C. Andre, Microsystem Technologies, vol. 47, Springer, Berlin, 1997, p. 42.
6. H. Lorenz et.al., Proceedings of MME'96 (Micro Mechanics Europe), Barcelona, Spain, October 1996.
7. J.A. van Kan, J.L. Sanchez, B. Xu, T. Osipowicz, F. Watt, Nucl. Instr. and Meth. B 148 (1999) 1085.
8. S.V. Springham, T. Osipowicz, J.L. Sanchez, L.H. Gan, F. Watt, Nucl. Instr. and Meth. B 130 (1997) 155.
9. J.L. Sanchez, J.A. van Kan, T. Osipowicz, S.V. Springham, F. Watt, Nucl. Instr. and Meth. B 136-138 (1998) 385.
10. F. Watt, these proceedings (ICNMTA-6), Nucl. Instr. and Meth. B 158 (1999) 165.
11. F. Watt, I. Orlic, K.K. Loh, C.H. Sow, P. Thong, S.C. Liew, T. Osipowicz, T.F. Choo, S.M. Tang, Nucl. Instr. and Meth. B 85 (1994) 708.
12. F. Watt, T. Osipowicz, T.F. Choo, I. Orlic, S.M. Tang, Nucl. Instr. and Meth. B 136-138 (1998) 313.
13. M. Madou, Fundamentals of Microfabrication, CRC Press, New York, 1997, p. 286.
14. Y. Aoki, N. Kouchi, H. Shibata, S. Tagawa, Y. Tabata, S. Imamura, Nucl. Instr. and Meth. B 33 (1988) 799.
15. W.H. Bruenger, L.-M. Buchmann, M. Torkler, S. Sinkwitz, J. Vac. Sci. Technol. B 14 (6) (1996) 3924.