Homogeneity of multi-component hard coatings studied by surface analytical depth profiling and model calculations

Surface and Interface Analysis

Volumn 26, Issue 11, 1998, Pages 834-840

  Jehn, Hermann A ^a  

^a Depart of Electrochemistry Research Institute for Precious Metals and Metal Chemistry Fem   (Germany)

Author keywords

AES coating analysis; Elemental in depth homogeneity; Multi source PVD; PVD hard coatings

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPUTATIONAL METHODS; MATHEMATICAL MODELS; NITRIDES; PROTECTIVE COATINGS; VAPOR DEPOSITION;

HARD COATINGS; PHYSICAL VAPOR DEPOSITION (PVD);

SURFACE CHEMISTRY;

EID: 0032179392     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199810)26:11<834::AID-SIA435>3.0.CO;2-7     Document Type: Article

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