Physical and chemical analytical instruments for failure analyses in G-bit devices

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 329-332

  Mitsui, Yasuhiro ^a   Yano, Fumiko ^a   Nakamura, Yoshitaka ^a   Kimoto, Koji ^a   Hasegawa, Tsuyoshi ^a   Kimura, Shigeharu ^a   Asayama, Kyoichiro ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; CHEMICAL BONDS; ELECTRIC NETWORK ANALYZERS; ELECTRON ENERGY LOSS SPECTROSCOPY; FAILURE ANALYSIS; SEMICONDUCTING FILMS; SENSITIVITY ANALYSIS; SILICA; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

NANOMETERS;

DIGITAL INSTRUMENTS;

EID: 0032265854     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)