In-plane measurements of microelectromechanical systems vibrations with nanometer resolution using the correlation of synchronous images

Review of Scientific Instruments

Volumn 75, Issue 10 I, 2004, Pages 3335-3341

  Serio, B ^a   Hunsinger, J J ^a   Cretin, B ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CAMERAS; CHARGE COUPLED DEVICES; FAST FOURIER TRANSFORMS; INTERFEROMETRY; LIGHT EMITTING DIODES; PHASE SHIFT; VIBRATIONS (MECHANICAL);

INTERFEROMETRIC IMAGING; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROSTRUCTURE MOTION; TEMPORAL RESOLUTION;

MICROELECTROMECHANICAL DEVICES;

EID: 9744285032     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1791337     Document Type: Article

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