Grating-enhanced through-wafer optical microprobe for microelectromechanical system high-resolution optical position feedback

Optics Letters

Volumn 28, Issue 14, 2003, Pages 1263-1265

  Dawson, J M ^a   Wang, L ^a   Famouri, P ^a   Hornak, L A ^a  

^a WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FEEDBACK; MICROSTRUCTURE; OPTICAL RESOLVING POWER; OPTICAL RESONATORS;

MODEL-BASED FAULT DETECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0042810833     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.28.001263     Document Type: Article

References (8)

1. F. M. Dickey, S. C. Holswade, L. A. Hornak, and K. S. Brown, Sens. Actuators A 78, 220 (1999).
2. P. R. Nelson, P. B. Chu, and K. S. J. Pister, Proc. SPIE 2640, 53 (1995).
3. L. A. Hornak, P. Famouri, J. M. Dawson, and L. Wang, Proc. SPIE 4561, 221 (2001).
4. E. J. Garcia and J. J. Sniegowski, Sens. Actuators A 48, 203 (1995).
5. J. Dawson, J. Chen, K. Brown, P. Famouri, and L. A. Hornak, J. Opt. Eng. 39, 3239 (2000).
6. J. M. Dawson, "Integrated through-wafer optical monitoring of MEMS for closed-loop control," (West Virginia University, Morgantown, W. Va., 2002).
7. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (Wiley-Interscience, New York, 1991).
8. J. M. Dawson, L. Wang, W. B. McCormick, S. A. Rittenhouse, P. Famouri, and L. A. Hornak, Proc. SPIE 4983, 34 (2003).