Error analysis for a diffraction grating interferometric stylus probing system

Measurement Science and Technology

Volumn 12, Issue 4, 2001, Pages 482-490

  Fan, Kuang Chao ^a   Su, Chung De ^a   Mou, Jong I ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Arizona State University   (United States)

Author keywords

Diffraction grating interferometry; Error analysis; Stylus probe

Indexed keywords

DIFFRACTION; ERROR ANALYSIS; ERRORS; HOLOGRAPHIC INTERFEROMETRY; INTERFEROMETRY; PROBES;

DIFFRACTION GRATING INTERFEROMETRIES; DIMENSION MEASUREMENTS; GRATING INTERFEROMETERS; HOLOGRAPHIC DIFFRACTION GRATINGS; OPERATING ENVIRONMENT; OPTICAL CHARACTERISTICS; PERFORMANCE CAPABILITY; STYLUS PROBES;

DIFFRACTION GRATINGS;

EID: 12144261084     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/12/4/312     Document Type: Article

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